Edwards nEXT400 D Turbomolekularpumpe ISO160, Einlassflansch

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Edwards nEXT400 D Turbomolekularpumpe ISO160, Einlassflansch
Beschreibung

 

Technische Daten

Einlassflansch                                                   DN160ISO-K

Saugleistungen               

N2                                                                  400 ls-1                                                               

He                                                                  390 ls-1

H2                                                                  325 ls-1

Kompressionsverhältnis

N2                                                                >1 x 1011

He                                                                  1 x 108

H2                                                                  5 x 105

Gewicht                                                           7,5 kg

Endvakuum mit

RV-Vorvakuumpumpe ISO/CF                          

Empfohlene Vorvakuumpumpe                          RV12 / nXDS10i

Empfohlener Controller                                    TIC200 (Turbo- und Instrumentencontroller)